Course work. The development of the vacuum circuit

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Uploaded: 12.05.2016
Content: Vakuumnaya_tehnika.zip (3713,44 kB)

Description

Course work in vacuum technology. The development of the vacuum circuit
CONTENT
introduction
1. Activity 3
2. Selection and approval of vacuum pumps and other components of the vacuum system 4
3. Description of selected elements of the vacuum circuit 5
   3.1. Vacuum pumps 7
   3.1.1. The operating principle of the device and the diffusion pump oil diffusion 7
   3.1.2. The operating principle of the device and rotary vane pump 16
   3.2. Traps 19
   3.2.1 Adsorption traps 19
   3.2.2 Nitrogen traps 21
   3.3 Description of selected assets vacuum measurement 23
   3.3.1. Electronic ionization vacuum 23
   3.3.2. Thermal vacuum 25
   Valve 26 3.4
   3.4 .1 Valve mock KN-2.5 with an electromagnetic drive 26
   3.4.2 Valves vacuum with electromagnetic actuator type KVM 27
4. Operation of the vacuum system 29
   4.1 To turn on the vacuum system 29
   4.2 The procedure for the process 29
   4.3 Procedure for switching off the vacuum system 30
Conclusion 31
References 32

Additional information

Drawings - Compass

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